ATIH creates many excess files during the restore operation

After restoring my profile from a backup copy I see that there are tens of thousands of excees files were created by ATIH. These files always have an extension that ends with "~". For example: N1F9K5RT~Cache0000000118.dat~

I created a backup copy of my user profile and then I restored it to a different location. ATIH created a lot of additional files whose extensions end with "~". I compared the original directories and the restored ones and I did not find these "additional" files.

I did not checked all the directories of my profile because there are many of them (my profile is 120Gb big) but the directories I checked contain "copies" of original files. For example:

DOC_609_001.tif
JG4V0A9G~DOC_609_001.tif~
DOC_609_002.tif
B1PD2OTG~DOC_609_002.tif~

I opened the backup copy and there were no such "~" files in the backup.

What does it mean? How do I rid of these files? Why are they created?